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VPS

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VPS stands for Vertical Process System which is the new concept of vertical glass transfer system (90℃)

Dry Unit
- Transfer -, A/K

Wet Unit
- Chemical, DI

TR Unit
- Robot, Shuttle

Transfer
- Horizontal, Incline Type
- Tank & Piping Room

Application Field
- TFT LCD
- C/F LCD
- PDP
- AMOLED
- FILM