CLEANER

기판위에 세정제 또는 순수를 사용하여 기판위의 자연산화막, 이온, 유기물, 금속 불순물을 제거하는 장치

A device that removes natural oxide fime, ion, organic matters, metal and impurities on substrates by using solutions or DI water.

Cleaning Unit
- Roll Brush TYPE
- 고압세정 (jet-Nozzle)
- M-Sonic (line shower)
- U-Sonic
- 순수 Rinse
- E-UV Clean
- IPA

Dry Unit
- Air-knife (Hot or Room Temp Air)
- IR DRY
- SPIN DRY

Transfer Unit
- Roller Conveyor

ETC
- Customized Dimension & Specification
- Full Automatiuon
- Real-Time Glass Monitoring System
- In-line Type대응
- Color Touch Screen 조작 Panel
- Loader / Unloader
- Ionizer (대전방지용)

적용분야
- TFT LCD
- C/F LCD
- PDP
- AMOLED
- FILM