ETCHER
PR에 의해 가려진 부분(즉 노광 공정에서 자외선을 받지 않은 부분)을 제외한 증착막을 제거하는 장치
Etching is the process for pattern formation of using PR pattern mask to cut into the unprotected parts of a metal surface
Etching Unit
- 요동 Type
- Spray Type
- Dip Type
Cleaning Unit
- 순수Rinse
Dry Unit
- Air-knife(Hot or Room Temp Air)
Transfer Unit
- Roller Conveyor
Dry Unit
- Air-knife(Hot or Room Temp Air)
Transfer Unit
- Roller Conveyor
ETC
- Customized Dimension & Specification
- In-line Type대응
- Color Touch Screen 조작 Panel
- Loader / Unloader
- Ionizer (대전방지용)
- Temp Controlled Chemical Mixing Tank(20~35±1℃)
적용분야
- TFT LCD
- C/F LCD
- PDP
- AMOLED
- FILM