ETCHER
一种去除由PR隐藏的部分以外的沉积膜的装置 (在曝光过程中不接受紫外线的部分)
Etching is the process for pattern formation of using PR pattern mask to cut into the unprotected parts of a metal surface
Etching Unit
- Shake Type
- Spray Type
- Dip Type
Cleaning Unit
- 纯净水 Rinse
Dry Unit
- Air-knife(Hot or Room Temp Air)
Transfer Unit
- Roller Conveyor
Dry Unit
- Air-knife(Hot or Room Temp Air)
Transfer Unit
- Roller Conveyor
ETC
- Customized Dimension & Specification
- In-line Type 对应
- Color Touch Screen 控制 Panel
- Loader / Unloader
- Ionizer (防静电)
- Temp Controlled Chemical Mixing Tank(20~35±1℃)
应用领域
- TFT LCD
- C/F LCD
- PDP
- AMOLED
- FILM