COATER
PHOTO-RESIST（光敏树脂）涂覆厚度均匀的基材。
A device that coats photo-resist in uniform thickness
Bake Unit
- Hot Plate
- Cool Plate
HMDS Unit
- PHOTO-RESIST和粘合增强
ER Unit
- Central Dispense & Spin Coating
- Slit Dispense & Spin Coating
- Only Slit Coation (第五代或更多)
ETC
- Customized Dimension & Specification
- Full Automatiuon
- Real-Time Glass Monitoring System
- In-line Type 对应
- Color Touch Screen 控制 Panel
- Loader / Unloader
- Ionizer (防静电)
应用领域
- TFT LCD
- C/F LCD
- PDP
- AMOLED
- FILM