CLEANER
一种通过在基底上使用清洁剂或纯水去除基底上的自然氧化膜，离子，有机物质和金属杂质的设备
A device that removes natural oxide fime, ion, organic matters, metal and impurities on substrates by using solutions or DI water.
Cleaning Unit
- Roll Brush TYPE
- 高压清洗 (jet-Nozzle)
- M-Sonic (line shower)
- U-Sonic
- 纯净水 Rinse
- E-UV Clean
- IPA
Dry Unit
- Air-knife (Hot or Room Temp Air)
- IR DRY
- SPIN DRY
Transfer Unit
- Roller Conveyor
ETC
- Customized Dimension & Specification
- Full Automatiuon
- Real-Time Glass Monitoring System
- In-line Type 对应
- Color Touch Screen 控制 Panel
- Loader / Unloader
- Ionizer (防静电)
应用领域
- TFT LCD
- C/F LCD
- PDP
- AMOLED
- FILM