에프엔에스테크(주)

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Pad Business

The Essential Material for Perfecting the CMP Process

“The core solution dictating yield in ultra-fine semiconductor manufacturing—driven by FNS Tech”


Securing Unrivaled Core Technology

· Starting with the acquisition of INNO Pad Inc. in the US in 2013, we absorbed advanced technologies and combined them with our proprietary polymer material synthesis and R&D capabilities to achieve technological independence.


Micro-Pore Control Technology Optimized for Ultra-Fine Processes

· We possess the process know-how to precisely control the size, density, and distribution of micro-pores in polyurethane at the nanoscale. This secures optimal slurry fluidity, maximizes polishing efficiency, and contributes to improving our customers' yield by reducing wafer surface defects. defects.


Providing Customized Solutions

· We flexibly design pad properties, such as hardness and compressibility, tailored to rapidly changing semiconductor devices and next-generation process characteristics. Through customized pads optimized for specific process objectives, we perfectly achieve the extreme global planarity and precision required by our customers.