COATER
A device that coats photo-resist in uniform thickness
Bake Unit
- Hot Plate
- Cool Plate
HMDS Unit
- Improved adhesion to photoresist
ER Unit
- Central Dispense & Spin Coating
- Slit Dispense & Spin Coating
- Only Slit Coation (5th generation or more)
ETC
- Customized Dimension & Specification
- Full Automatiuon
- Real-Time Glass Monitoring System
- In-line Type Applicable
- Color Touch Screen Control Panel
- Loader / Unloader
- Ionizer Antistatic
Application Field
- TFT LCD
- C/F LCD
- PDP
- AMOLED
- FILM