VPS
VPS代表立式加工系统，是立式玻璃转移系统（90℃）的新概念。
VPS stands for Vertical Process System which is the new concept of vertical glass transfer system (90℃)
Dry Unit
- Transfer -, A/K
Wet Unit
- Chemical, DI
TR Unit
- Robot, Shuttle
Transfer
- Horizontal, Incline Type
- Tank & Piping Room
应用领域
- TFT LCD
- C/F LCD
- PDP
- AMOLED
- FILM